低压电化学合成类金刚石薄膜研究

Research on Synthesising Diamond-Like Carbon( DLC) Film by Low Voltage Electrodeposition Technique

采用液相电化学沉积方法,以乙醇为碳源,并加入含有KCI的去离子水溶液,在较低电压下(60 V以下),在铜基底上沉积出类金刚石(DLC)薄膜。用SEM表征薄膜表面形貌,用Raman光谱表征薄膜成份结构。结盟表明,少量KCI的加入,能够大幅降低沉积电压并提高DLC的沉积速率;沉积出的类金刚石膜均为连续,有较低的表面粗糙度;SP3碳键含量较高(约为30%)。

A mixture of ethanol is taken as carbon source and deionized water containing KCI is added and under the low voltage （up to 60 V）,diamond-like carbon （DLC） film is deposited on copper substrates by liquid-phase electrochemical deposition method.The morphology of the film is characterized by scanning electron microscopy（SEM） and the composition and structure of the film are analyzed by Raman spectroscopy.The results show that it is possible to reduce the deposition voltage significantly and raise the deposition rate by adding.a small amount of KCI.The deposited DLC film is smooth,continuous,its surface roughness is low and its SP3 carbon bond content is high（alout 30％）.