摘要
运用ANSYS Workbench12.0有限元软件对一种单片四元阵列微机电系统(MEMS)矢量水听器微结构进行了有限元分析。首先介绍了四元微结构的工作原理,然后推导了四元微结构的数学模型并建立了有限元模型,最后对该微结构进行了静、动态特性分析,得到了该四元微结构的电压灵敏度为0.6mV/Pa,维间耦合≤1.6%,固有频率为1 982.5Hz,满足水听器设计指标。
A finite element analysis of the single chip four-element array MEMS vector hydrophone microstructure was carried out by finite element software of ANSYS Workbench 12.0.First,the four-element microstructure ＇s working principle was presented.Then its mathematic model is derived,and the finite element model of the microstructure was established.Finally,the static and dynamic characteristics of the microstructure were analyzed.The results indicated that the microstructure＇s voltage sensitivity was 0.6 mV/Pa,and the interference error is less then 1.6％,and the natural frequency is 1 982.5 Hz.The specifications can meet the requirements of the vector hydrophone＇s design.
出处
《压电与声光》
CSCD
北大核心
2013年第6期910-914,共5页
Piezoelectrics & Acoustooptics
基金
国家"八六三"计划基金资助项目(2011AA040404)
国家自然科学基金资助项目(61127008)
