接触定位式量块干涉仪测量不确定度的分析

Analysis of Measurement Uncertainty for A Type of Contact Positioning Gauge Block Interferometer

分析了一台用于测量量块的激光干涉仪的测量不确定度。着重介绍了干涉信号质量 ,空气折射率及材料热膨胀等因素对测量不确定度的影响。

The uncertainty of measurement of a laser interferometer used in measuring gauge block is analized in this paper.The influence of factors,such as the quality of the interference signal.The refraction index of the atmosphere and the thermal expansion of materials etc,on the uncertainty of measurement are presented emphatically.