摘要
MOS(Matel-Oxide-Semiconductor)器件阈值电压提取过程中的一些求导运算放大了测量数据中所包含的涨落因素(噪声和测量错误),使阈值电压提取过程变得不稳定.本文采用Savitzky-Golay低通滤波算法,求导运算和滤波过程同时进行,有效地抑制了测量数据中的涨落.再结合目标曲线峰值附近局域匹配系数判据,阈值电压提取过程就可以稳定且自动地完成,这为MOSFET(MOS Field-Effect Transistor)特性分析及集成电路设计工作带来很大方便.
Originally from the noise and errors in measurement ,the fluctuations make the extraction of MOSFET’s threshold voltage unstable ,which will become worse in the case of the derivation operation .We proposed that the Savitzky-Golay filtering al-gorithm could be introduced into the derivation process in order to alleviate the influence of fluctuations effectively .A criterion for assessing the goodness of filtering was presented ,and then the extraction of threshold voltage of MOSFET could be achieved stably and automatically ,which will be in favor of the characterizing MOS devices and designing integrated circuits .
出处
《电子学报》
EI
CAS
CSCD
北大核心
2013年第11期2242-2246,共5页
Acta Electronica Sinica
基金
湖南省科技计划项目(No.2012GK3151)
