摘要
采用工业用直流脉冲等离子体增强化学气相沉积(PCVD)法在硬质合金刀具材料上制备了TiN/TiSiN复合涂层。对比研究了TiN及不同温度制备的TiN/TiSiN复合涂层高温抗氧化性能。研究表明:含有非晶阻隔抗氧化结构Si3N x的TiN/TiSiN复合涂层高温氧化性能远高于TiN涂层,TiN/TiSiN复合涂层提高到800℃,仍可避免出现较大面积氧化及脱落;PCVD直流脉冲沉积制备温度对涂层高温抗氧化能力有重要影响,550℃沉积制备的致密、均匀、颗粒小的复合涂层高温氧化性能最佳,600℃次之,500℃最差。
The TiN coating and TiN/TiSiN multilayer coatings were deposited on substrate of WC - Co cutting tools u- sing an industrial dc pulsed plasma chemical vapor deposition（PCVD）. The high temperature oxidation resistance perform- ance of the coatings were investigated. The high temperature oxidation resistance performance of TiN/TiSiN muhilayer coat- ings were obviously better than that of TiN coating. The deposited temperature of dc pulse PCVD method Influences impor- tantly on the high temperature oxidation resistance of TiN/TiSiN muhilayer coatings. The high temperature oxidation resist- ance performance of TiN/TiSiN coated in the 550℃ is the best among that of the three TiN/TiSiN coatings. The perform- ance of TiN/TiSiN coating deposited in the 500℃ is the worst. The that in the 600℃ is the middle.
出处
《工具技术》
2013年第12期17-20,共4页
Tool Engineering
