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MEMS扭转光开关压模阻尼研究

Research on squeeze-f ilm damping of MEMS torsional optical switches
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摘要 基于MEMS技术的光开关是光通信领域实现全光交换的核心器件。针对一种常用的静电扭转驱动光开关,基于流体动力学方程,采用格林函数(Green's function)分析了压膜阻尼系数的解析求解方法,并以流场分析技术进行了气体压强分布仿真,进而求解压膜阻尼,运用解析计算与数值仿真得到的参数进行系统仿真与实验数据比对,证实了建模的准确性。 MEMS optical switch is one of the key components for all-optical switching application in optical communication. Aiming at a kind of electrostatictorsion-actuated optical switch, based on the fundamental hydrodynamics, Green function is adopted to derive the analytic model of squeeze-film damping coefficient. Flow fi eld analysis technology is applied to simulate gas pressure distribution, and then the squeeze-fi lm damping coefficient is calculated. The results of analysis and simulation are compared with experimental data and the feasibility of the modeling is confi rmed
作者 白诚 王伟 李卫
机构地区 西安通信学院 西安电子科技大学 中国科学院西安光学精密机械研究所
出处 《传感器世界》 2013年第12期7-10,共4页 Sensor World
关键词 MEMS 光开关 气膜阻尼 雷诺方程 MEMS optical switch squeeze fi lm damping Reynolds equation
分类号 TN929.1 [电子电信—通信与信息系统]
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参考文献6

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二级参考文献13

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传感器世界
2013年 第12期

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