洁净系统中激光诱导颗粒污染物的分析与评估

ANALYSIS AND EVALUATION OF CONTAMINANT PARTICLES FROM THE EFFECT OF LASER TO MATERIALS IN CLEAN SYSTEM

高功率激光系统要求在洁净环境中运行,若光学元件表面在工作过程中附着污染物,将导致光学元件的损伤及整个系统负载能力的下降。针对洁净系统中激光与材料作用而产生的颗粒物,分析其作用机制,探讨用于评估的理论依据,讨论测量的需求和方法,并对系统表面存在的颗粒污染物进行了实际测量分析,提出了深入开展高功率激光系统中颗粒污染物测量与评估的技术途径。

High power laser system need to be run in a clean environment. If the surface of the optical element attached pollutants in the work process, it will do a damage to the optical components and lead to decline in the load capacity of the entire system. The mechanism of laser affecting to materials which produced particles was analysed. The theoretical basis for the assessment was probed. The requirement and method of measurement was discussed . The contaminant particles which exist in the system surface were measured and analysed. At last, we proposed the technical approachto carry out measurement and assessment of contaminant particles in the high power laser systementirely and deeply.