共面波导延迟线薄膜电路研制

Research on Coplanar Waveguide True-time Delay Line Thin Film Hybrid Circuit

基于薄膜电路工艺制作的共面波导延迟线不仅具有体积小、重量轻、损耗低、抗干扰性强等优点,还易与其他微波电路集成,延时精度较准。但它对高精度、密集孔薄膜电路的制作提出了更高的要求。通过优化薄膜电路制作工艺流程,研制出图形精度优于±5μm,具有良好金属化通孔的X波段两位延迟线薄膜电路。测试结果显示,该X波段两位延迟线的插入损耗为-5.7～-4.6 dB,带内起伏优于±0.3 dB,中心频率点相位偏差为±5°,满足设计要求。

The coplanar waveguide true-time delay line, which is fabricated by thin film hybrid circuit＇s process, has several advantages such as small volume, light weight, low insert loss, and high anti-interference. It also can integrate with other microwave circuits conveniently, and the precision of true-time delay is exactly. Certainly, the fabrication of thin film hybrid circuit with high precision pattern and denseness vias process is more difficult. Through optimize the fabrication process, an X-band 2 bits true-time delay line thin film circuits has been fabricated. The microstrip precision is better than ± 5 μm. As show by the test results, the insert loss of 2 bits true-time delay line is -5.7～-4.6 dB, the in-band loss variation is less than ± 0.3 dB, and the phase bias at operating frequencies is ±5°.