摘要
微纳米超精密测量是目前热点研究领域,光纤布拉格光栅作为良好的传感元件,用于微纳米测量领域具有广阔前景。首先对光纤布拉格光栅传感的基本原理进行了分析,在此基础上,采用布拉格光纤光栅熔制悬挂式探针测头作为传感元件,利用匹配法进行波长解调,然后设计一整套系统,以实现微位移量测量。利用激光干涉仪和PI微动平台对系统性能进行标定,并利用广义多项式对测量数据进行拟合。实验结果显示:系统分辨率达到10 nm,曲线拟合优度为0.999 6。
Micro/nano super precision measuring technology is representative of the research field, optical fiber Bragg grating as a good original sensor has been used to the micro/nano measurement field with broad prospects. The basic principle of displace- ment sensing was analyzed, and based on this, a kind of fiber Bragg grating fusion system suspended probe as sensing element was designed , and matching method to demodulate the wavelength shift, a set of system was devised to measure micro-displacement. Be- sides, the system was testified by laser interferometers and PI micro-displacement on system performance test, and the data collected was generalized polynomial fitted. The experimental results show this set of system＇ s sensor the minimum systematic resolution is 10 nm and the goodness-of-fit is 0. 999 6.
出处
《仪表技术与传感器》
CSCD
北大核心
2013年第11期108-110,共3页
Instrument Technique and Sensor
基金
国家科技重大专项(2011ZX04014-071)
国家自然科学基金资助项目(512051)
