数字式气压传感器静态性能测试与评估

Tests and evaluation on static performance of digital barometric sensors

为了掌握硅压阻、数字式振筒和硅电容3种气压传感器的静态性能,进行了2次静态性能测试(非线性、迟滞、重复性)、温度测试和长期稳定性试验,并对相应各项性能进行了评估和比较。结果表明,硅电容式传感器静态特性和温度稳定性均优于其他2种;振筒式静态特性在不同环境温度下均表现良好且较稳定;常温下,硅压阻传感器表现良好,性能与振筒式接近,但低温条件下,性能下降明显,温度系数达0.002 1hPa/℃。3种传感器长期稳定性比较结果说明了引入年漂移量作为周期检定的必检项目的必要性,测试结果也证明硅电容式气压传感器已达到了气象观测业务使用要求。

Experiments on static~ temperature and long-term stability were performed to study the static performance of the silicon piezoresistance barometric sensor, digital vibrating cylinder and silicon capaci- tance barometric sensor. These barometric sensors for various performance were also evaluated and com- pared. According to the data. It indicates that the static performance and temperature stability of silicon capacitive sensor are both better than the other two; that vibration cylinder maintains good and stable stat- ic performance at different environmental temperature~ that under normal temperature, the piezoresistive sensor has good performance close to the vibration cylinder, but the performance decreases significantly at low temperature, and that the temperature coefficient reaches 0. 0021 hPa/℃. It proves the necessity of introducing the year drift quantity as integrant check project in cycle test. The experiment result also indi- cates that the silicon capacitive pressure sensor has met the requirement of meteorological observation bus- iness application.