样品高度对XPS测试的影响

Effects of Sample Height on XPS

采用Al靶微聚焦单色器光电子能谱仪进行XPS测试时,如果样品高度选择不好,会导致测得的光电子峰强度降低.而对于一些电子结合能较高的元素,其光电子峰会变宽,有时出现双峰.分析了该现象的原因是X射线光斑、电子中和枪中和区域以及光电子能量接收区域没有聚焦于同一点.

When microfocusing monochromatic Al target XPS experiments are used to carry out, it is necessary to make X- ray irradiation area, electron neutralization area and photoelectron acceptance region focus on the same point. However, when samples are analyzed at an inappropriate height, the above can not centre on the same area. In such case the intensities of core lines are likely to reduced, and for the elements with relatively high binding energy, the peaks are likely to broaden, and sometimes split in double.