摘要
通过采用SiO2/SiNx叠层膜作为背钝化介质层,PECVD沉积掺硼氧化硅结合激光掺杂形成局部背场,依次经过背面溅射铝、低温烧结形成背面电极,电镀形成正面电极制备PERL结构单晶硅太阳电池。对比不同清洗条件对表面钝化的影响,背面电极不同烧结条件对单晶PERL电池电性能的影响,优化后单晶电池转换效率可达20.36%。
The monocrystalline silicon solar cells with passivated emitter and rear locally diffused (PERL) structure were studied. The PERL structure solar cells consist of SiOJSiNx rear passivation stacks, local back surface field formed by laser doping boron doped SiO2, rear electrode formed by low temperature annealed sputtering aluminum, and electrodeplated front electrode. The influence of different cleaning conditions on the surface passivation and the effect of rear electrode annealing conditions on the electrical performance were investigated, respectively. After process optimization, efficiency of monocrystalline silicon PERL cells up to 20.36% was demonstrated.
出处
《太阳能学报》
EI
CAS
CSCD
北大核心
2013年第12期2170-2174,共5页
Acta Energiae Solaris Sinica
基金
国家高技术研究发展(863)计划(2012AA050302)