基体粗糙度和硬度对TiAlCN附着力的影响

Effect of matrix materials hardness and roughness on adhesion of TiAlCN coatings

在不同粗糙度和硬度的GCr15轴承钢基体上,利用多弧离子镀技术低温(175℃)沉积TiAlCN涂层.利用扫描电子显微镜(SEM)、AFM、EPMA、XRD和附着力测试仪等研究了薄膜形貌和性质.结果表明:基体越平整,制备的涂层表面也就越平整;薄膜附着力随着表面粗糙度的增大而减小,在基体粗糙度为0.01μm时,薄膜附着力达到最大值42.8N;基体硬度越高,膜/基附着力越大,在基体硬度为835HV0.01时,附着力达到最大值31.2N;在涂层中,发现了晶体结构为fcc-TiN结构,衍射图中没有AlN相出现,这是TiN相优于AlN相而形成的缘故.

The composite TiAlCN coatings were deposited by vacuum arc ion plating on GCr15 rings with different matrix materials hardness and roughness at 175 ℃ .The analysis results of SEM ,AFM ,EPMA ,XRD ,adhesion tester indicated ：as the substrate surface roughness ,the preparation of the coating surface would be smooth .Film adhesion decreased with the increased of surface roughness .When the roughness was 0 .01 μm ,the film adhesion was up to the maximum of 42 .8 N .The higher the hardness of matrix ,the greater the adhe-sion of film/substrate was obtained .As the substrate hardness was 835 HV0 .01 ,the maxi-mum adhesion was 31 .2 N .The crystal structure of fcc-structure of TiN was found in the film .The diffraction pattern without AlN phase ,it was because of TiN phase was better than that of AlN phase formation .