基体温度对氮化钛涂层微观结构的影响

Influence of Substrate Temperature on Microstructure of Titanium Nitride Coatings

采用双辉离子渗金属（DGPSA）技术，在硬质合金基体表面上沉积氮化钛（TiN）涂层，通过x射线衍射（XRD）表征和显微硬度计测试，研究了基体温度对TiN涂层微观结构及其性能的影响．实验结果表明：所制备的TiN涂层均为面心立方结构，并且基体温度明显影响TiN涂层的织构系数、晶粒尺寸、晶格常数、残余应力、微观硬度和耐磨性能．当基体温度为650～780℃时，所沉积TiN涂层具有最小的晶粒尺寸、最高的显微硬度、最大的晶格常数和最好的耐磨性能．

Titanium nitride （TIN） coatings were deposited on the surface of hard alloy tools using the double glow plasma surface alloying （DGPSA）. The effect of substrate temperature on microstructure and mechanical characteristics of TiN coatings was investigated by X-ray diffraction （XRD） and microhardness test. Experimental results demonstrate that all the TiN coatings consist of the face-centered cubic crystal structures, and that the substrate temperature significantly affects the texture coefficient, grain size, lattice constant, residual stress and microhardness of the coatings. The TiN coating deposited at substrate temperature of 650 ~ 780 ~C has the maximum lattice constant, the lowest grain size, the highest microhardness and the best wear resistance.