ArF准分子激光光源电极系统设计及电场仿真研究

Electrodes System Design and Electric Field Simulation Research of ArF Excimer Laser

电极系统是ArF准分子激光光源的核心部件。首先通过对ArF准分子激光光源电极系统的初步设计,得到合适的放电区尺寸,提供了电极和预电离电极电压的加载方式,从而形成由阴极、阳极、预电离电极、陶瓷件和工作气体五部分组成的电极系统简化模型。然后基于该电极系统简化模型,在不同电压加载条件下进行了电场仿真。仿真结果表明,放电区域电场分布均匀对称,电极系统设计较为合理。

Since electrodes system is the key part of ArF excimer lasers, this paper is devoted to study the electrodes system of ArF excimer laser. By proper design of electrodes system, the optimized size of discharge zone is given and the approach of on-load voltage for cathode, anode and preionization electrodes is provided. Then a simplified configuration of electrodes system, consisting of cathode, anode, preionization electrodes, ceramic materials and working gases, is obtained. The electric field under different on-load voltages is calculated based on the simplified configuration of electrodes system. Simulation results show that electric field of discharge region is symmetrical, and the design of electrodes system is reasonable.