直拉硅单晶热场加热器设计分析

Analysis of hot zone heater for single crystal silicon by Czochralski technique

通过对直拉硅单晶热场及加热器的分析,提出了加热器的设计原则和电阻计算方法。并对加热器使用过程中的常见问题进行了分析,并提出了解决方案,提升了加热器的使用寿命,提高了单晶棒的品质。

Through the analysis of CZ silicon single crystal hot zone and heater, principles about heater design and resistance calculation method were put forward. Based the analysis of common problems during the use of heater, solutions were proposed, so the lifetime of the heater was increased, and the quality of single crystal ingot was improved as well.