摘要
针对磁控溅射镀膜生产中,靶电源的输出功率存在大时滞、非线性和难以确定其精确数学模型等问题,提出了将PLC技术与模糊算法相结合的控制策略实现靶电源输出功率的模糊智能控制。首先对模糊控制的原理和模糊控制器的设计进行了详细介绍,然后给出了模糊算法在PLC控制上的具体实现方法。在程序的设计上,采用离线计算、在线查表的方法,不仅节省了实际控制中的计算时间,而且使得复杂的模糊控制算法在实际应用中简单明了。最后通过仿真验证了模糊控制策略在靶电源输出功率的控制上达到了良好的效果。
Considering the problems of the long time delay, nonlinearity and difficult to build the exact mathe- matical model, a control strategy combined PLC techr, ology with fuzzy algorithm is proposed to achieve the tar- get of intelligent control of the target power＇ s output power. Firstly, the principle of fuzzy control and the design method of fuzzy controller are introduced, then the procedures of using fuzzy algorithm in PLC control are giv- en. In the program design, methods of off-line calculation and online look-up table are used to save computing time in the actual control, and make complex fuzzy algorithm simple in application. Finally, the simulation veri- fies that the strategy can achieve good results in the control of the target power＇ s output power.
出处
《测控技术》
CSCD
北大核心
2014年第1期91-95,共5页
Measurement & Control Technology
关键词
磁控溅射
PLC
模糊控制
离线计算
在线查表
magnetron sputtering
PLC
fuzzy control
off-line calculation
online look-up table
