大型高真空容器的气体负荷分析

Gas load analysis of large-scale high vacuum vessel

随着科学技术的进步,某些用途的真空装置向大型化、高真空度的方向发展。分析表明材料出气和漏气是大型高真空容器的主要气体负荷,在容器及密封结构设计、检漏设计、制造工艺技术分析中应重点研究,以提高大型高真空装备的技术水平。

With the improvement of science and technology, the development of some vacuum equipments goes toward large scale and high vacuum. Analysis shows that material degassing and gas leakage are the main gas load of large-scale high vacuum vessels. In order to enhance the technical level of large high-vacuum equipments, degassing and leakage should be given more attention in the design of chamber and sealing structure, leak detection design and technological analysis for manufacturing process.