含氟有机减反射膜的研究

STUDY ON THE ANTIREFLECTIVE FILMS CONTAINING FLUORINE

采用低温等离子体辉光放电技术,用含氟有机单体在硅太阳电池表面聚合成膜。测定膜的光电性能和反射率证实:有膜电池的短路电流、光电转换效率及光谱响应都有明显增加,反射率绝对值降低2％左右,膜为非晶结构。此外,还研究了成膜工艺因素和膜电池性能的关系。

This paper describes the polymerization of monomer containing fluorine by the low-temperature plasma glow discharge to produce the antireflective films which deposited on textured solar cells. The reflective rates and photoelectrical character are measured. The effect of the films to the short circuit current the photoelectrical transform and the spectral response of the solar cells rised clearly. The reflective rates are fallen 2%, The resuts of X-ray analysis shows that films are amorphous. The dependence of the properties of films on the preparing condition are studied.