摘要
运用分子动力学(MD)的研究方法,经过分子聚合、能量最优化和退火模拟等构建了不同长细比的SU-8光刻胶模型,模拟研究了在室温条件下不同长细比的SU-8胶纳米尺寸模型的弹性模量、泊松比、剪切模量等力学性能参数。结果表明,在室温下,随着SU-8胶模型长细比的增加,材料的杨氏模量和剪切模量逐渐增大,这一现象与微尺度SU-8胶模型的实验结果一致,表明有效长细比是微尺度下表征材料力学性能和尺寸效应的一个重要参数。
Molecular dynamic simulation was applied to build SU-8 photoresist models with different slenderness ratios by employing molecule polymerization, energy optimization and anneal simulation, and investigate mechanical properties of microscale SU-8 photoresist by calculating the elastic Modulus, Poisson' s ratio, shear modulus etc at room temperature. The results show that the elastic modulus and shear modulus of materials gradually increase with the increase of the SU-8 photoresist model slenderness ratio at room temperature. This phenomenon is consistent with experiment results of the microscale SU-8 photoresist model, which indicates that the effective slenderness ratio is an important parameter for the mechanical properties and size effect of microscale characterization.
出处
《高分子材料科学与工程》
EI
CAS
CSCD
北大核心
2014年第1期96-99,共4页
Polymer Materials Science & Engineering
基金
国家重点基础研究发展规划项目(2011CB302101
2011CB302105)
国家自然科学基金资助项目(51175056)
关键词
SU-8光刻胶
力学性能
分子动力学
长细比
Keywords : SU-8 photoresist
mechanical properties
molecular dynamics
slenderness ratio