利用压电陶瓷产生标准间隙的装置设计

Design of Standard Clearance Equipment Based on Piezoelectric Ceramics

研究压电陶瓷产生连续可调标准间隙的机理,设计利用压电陶瓷产生标准间隙的装置架构模型,开发了装置的压电驱动器、电压驱动PID闭环控制系统、直流驱动电源关键部件,最后对整个装置性能进行测试。该系统θX、θY偏摆范围从1 mrad到12 mrad,Z方向行程范围从7μm到60μm,实现亚毫秒响应速度和亚微弧定位精度,最大偏摆范围达±6 mrad。该装置具有精度高、测量链短、读数准确性高、连续可调等特点。

This paper researches on generation of continuous and adjustable standard clearance equipment with piezoelectric ceramics. The key technology and parts including piezoelectric actuator, voltage driver PID closed-loop control system and DC power supply drive are researched. The whole equipment is tested. The deflection range θx and θr of the system is from 1 mrad to 12 mrad, and the travel range of Z direction is from 7 lain to 60 lain. The system realizes millisecond response speed and micro-arc positioning accuracy. Its deflection of the largest range is ± 6 mrad. The equipment is high accuracy, short of measuring chain, high reading accuracy and continuously adjustable.