摘要
为了降低大直径硅单晶生长过程中氧的引入 ,对常规的 4 0 6mm(16英寸 )热场进行了改造。设计了以矮加热器为核心的复合式加热器系统 ,使晶体生长过程中熔体热对流减小。通过对热场的数值模拟计算 ,分析了热场的温度分布 ,发现熔体的纵向温度梯度下降 ,熔体热对流减小 ,硅单晶中氧含量降低。
In order to reduce oxygen content in large diameter Czochralski Si single crystal (CZSi),we have modified the heat zone in 406mm(16in.) system.Thermal convection of melt has been suppressed by our new heat system with composite heater.Distribution of temperature filed was calculated by numeric simulation.The result indicated that axial temperature gradient was decreased due to the decrease of thermal convection in the melt.The concentration of oxygen in CZSi has been reduced.
出处
《人工晶体学报》
EI
CAS
CSCD
北大核心
2000年第4期381-385,共5页
Journal of Synthetic Crystals
基金
国家自然科学基金资助项目!(6 9876 0 11)
关键词
直拉硅单晶炉
热场
加热器
热对流
数值模拟
改造
CZSi
heat zone
heater thermal convection
oxygen concentration
numeric simulation
