电多极透镜的束流光学

The Beam Optics of Electric Multipole Lens

本文推导了电多极透镜的象差矩阵△M,并证明|△M+I|=1,在此基础上考虑象差时,只要对束流相椭球进行适当修正,束的传输仍可按相椭球规则进行,从而建立了电多极透镜的束流光学。

In this paper, the beam optics of an electric multipole lens containing aberrations is established, the aberration matrix is derived, and its determinant is shown to be unit. When the beam travels through an electric multipole lens and the aberrations exist, the electron beam theory for ellipsoid in phase space is still valid.