摘要
本文以高纯SiF4生产过程中精馏后的HF含量作为质量管理的对象,论述SPC技术在SiF4生产质量控制中的初步应用。
In this paper, hydrogen fluoride content of high-purity silicon tetrafluoride production after distilla- tion was as quality management objects, was discussed preliminary application of quality control of THe SPC（sta- tistical process control） technology in the production of silicon tetrafluoride.
出处
《化学工程师》
CAS
2014年第1期15-17,28,共4页
Chemical Engineer
关键词
SPC
四氟化硅
控制图
过程能力指数
SPC
silicon tetrafluoride
control charts
process capability indices
