硅基底液晶光阀的理论和工艺研究

STUDY ON THEORY AND TECHNOLOGY PROCESS OF LIQUID CRYSTAL LIGHT VALVE OF Si SUBSTRATE

本文介绍了一种新型空间光调制器——硅基底液晶光阀。阐述了该器件的工作原理和各膜层的制备过程。最后提出了两种薄双面抛光片的方法,它们是实现该器件实用化的关键工艺。

A new high performance device, fast-response silicon liquid crystal spatial light modulator has been developed. The novel device embodies a silicon photoconductor, coupled with an oxide layer to form an MOS structure, a dielectric mirror and a liquid crystal layer sandwiched between indiumtin-oxide transparent electrodes deposited on optical quility glass flats. Detailed descriptions is given for the operation and fabrication of the device. The problems and difficults in arts of fabrication are pointed out and the ways which how to deal with them also are given.