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等离子体预处理对于太阳能电池性能的影响 被引量:1

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摘要 在这个研究中,我们验证等离子体预处理对太阳能电池性能的影响,也就是SiNx:H层的性能。我们发现预处理的时间对于沉积物SiNx:H层影响比较小,较短的PECVD预处理时间,其钝化作用相对于长时间预处理更加有效。同时,预处理时间在300秒范围内对于太阳能板的效率起着次要作用。
出处 《科技创新与应用》 2014年第6期36-37,共2页 Technology Innovation and Application
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参考文献5

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二级参考文献7

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