MEEVA源生成Ti金属等离子体粒子密度和电离度的原子发射光谱诊断

ATOMIC EMISSION SPECTROMETRY DIAGNOSTIC OF PARTICLE DENSITY AND IONIZATION DEGREE FOR MEVVA Ti PLASMA

利用原子发射光谱对等离子体粒子密度进行诊断的Saha-Boltzmann方程法,并对其进行了改进.并结合多谱线斜率法,针对用英国avantes公司生产的AvaSpec-2048FT-8-RM型光栅光谱仪采集到的金属蒸汽真空弧(MEVVA)源生成的金属钛等离子体的发射光谱,对其电子、离子温度,电子、原子、一价离子和二价离子密度,原子和一价离子电离度进行诊断;对MEVVA Ti等离子体的热力学状态进行了判断;从而实现MEVVA Ti等离子体的发射光谱诊断.此外,还对MEVVA Ti等离子体参数随离子源工作弧压的变化情况进行了讨论.

A method to measure plasma particle density by atomic emission spectroscopy （Saha-Boltzmann method） was modified and improved. Multi-line slope method was used to analyze emission spectra of MEVVA Ti plasma which were obtained from AvaSpec-2048FT-8-RM platform Fiber Optic Spectrometer. Temperature of electron and ion, particle density of electron, atom, monovalent ion and divalent ion, and ionization of atom and monovalent ion were diagnosed. The thermodynamic state was also discussed. Emission spectroscopy diagnostic of MEVVA Ti plasma was achieved. Relationship between plasma parameters and arc voltage of ion source was also discussed.