栅网式离子能量分析仪中栅网特性的模拟研究

Simulation of Grid Characteristics of Gridded Ion Energy Analyzer

等离子体中离子能量的分布是离子束加工技术的关键参数之一。本文基于栅网式离子能量测试原理,采用离子光学模拟软件Simion7.0对栅网式离子能量分析仪的网格大小和网格间距进行了理论分析,这两个几何结构参数影响着离子能量的测试。理论分析结果表明,在离子能量为800 eV左右时,网格尺寸的大小会影响离子能量的测量精度,网格间距的大小对离子能量的测量结果几乎不产生影响。本文的研究结果对栅网式离子能量测试装置的设计及网格参数的优化具有重要的理论和实践指导意义。

The characteristics of the gridded ion energy analyzer were physically approximated and modeled,mathematically,simulated and experimentally evaluated. The impacts of the geometry and structure of the energy analyzer,such as the mesh size and grid spacing,on the measurement precision of the ion energy were simulated with the Ion Optical Simulation software package,Simion 7. 0. The simulated results show that the measurement accuracy of the ion energy strongly depends on the mesh size,but rather weakly on the grid spacing. The considerations involved in the design optimization of the gridded ion energy analyzer were also tentatively discussed in a though provoking way.