Er^(3+)/Yb^(3+)掺杂的ZnO薄膜光波导的特性研究

Growth of ZnO Films Co-Doped with Er and Yb and Its Optical Waveguide Property

以Er3+/Yb3+掺杂的ZnO烧结陶瓷为靶材,利用射频磁控溅射技术在石英玻璃上制备了高度c轴取向的纳米Er3+/Yb3+掺杂的ZnO薄膜,利用X射线衍射、棱镜耦合、卢瑟福背散射等技术研究了所沉积薄膜的结构和光波导特性,结果表明:薄膜中均出现(002)衍射峰,且随着温度的增加,衍射峰半高宽减小,强度增大,(100)晶面逐渐消失。600℃时出现(004)晶面,薄膜的模有效折射率接近ZnO晶体的折射率。

The ZnO thin films,co-doped with Er and Yb,were synthesized by RF magnetron sputtering on quartz glass substrates. The impacts of the sputtering conditions on the microstructures and properties of the ZnO films were evaluated for the process optimization. The films were characterized with X-ray diffraction and Rutherford back scattering spectroscopy. The results show that doping of Er and Yb generated optical amplification and emission,and that the substrate temperature strongly affected the optical properties of the films. For example,as temperature increased,the intensity of the（ 002） peak increased,but its full width at half maximum decreased,and the（ 100） peak vanished. Deposited at 600℃,its effective refractive index was found to be close to that of bulk ZnO.