蜂巢基底纳米颗粒SEM图像分析方法研究

Analysis method for SEM image of nanoparticles on honeycomb substrate

分析了蜂巢形基底上纳米颗粒SEM图像的特征,阐明了纳米颗粒特征值提取所遇到的问题。借助形态学滤波、直方图均衡、颗粒分析等图像处理方法,解决了图像二值化处理后纳米颗粒图像上的大孔洞、粘连颗粒影响粒径提取等问题。给出了蜂巢形基底上纳米颗粒SEM图像处理算法,实现了占空比、粒径分布等纳米颗粒特征值提取的目标,为进一步对纳米器件的参数进行定量评价和改进奠定了基础。

The SEM image features of nanoparticles on honeycomb substrate are analyzed and the problems during extraction of characteristic values of the nanoparticles are clarified. The big hole of nanoparticle image and interference of getting particle size by touched particles after image binarization treatment are solved by using image analysis methodology such as the morphological filtering, histogram equalization, and particle analysis. The SEM image processing algorithm of nanoparticles on honeycomb substrate is stated, and the targets of characteristic values extraction of nanoparticle such as duty radio and particle size distribution are archived. All these efforts lay the foundation of further quantitative evaluation and improvement of nanodevice parameters.