摘要
从生物化学和蛋白质的裂解机制出发 ,提出一种新的重铬酸盐明胶 (DCG)浮雕形成方法———化学裂解刻蚀法。由于化学裂解试剂较胰蛋白酶具有少得多的作用位点 ,化学裂解方法比明胶酶蚀方法具有更高的刻蚀分辨率。实验考察表明 ,化学裂解方法可以获得 5 0 0lines mm的刻蚀分辨率。应用化学裂解方法 ,利用投影曝光系统和灰度掩摸 ,制作了单元线宽为 30 μm ,深度为 0 8μm的连续浮雕明胶微棱镜列阵。
Chemically cleaving-etch method was presented to form relief modulation in gelatin based on the analysis on the cleavage of protein. Thank to the much fewer number of cleavage site for chemical cleavage than that for enzyme, chemical cleavage method was of higher etching resolution and better profile fidelity. The predication was proved to be right and experiments showed that relief modulation resolution was got to 500 lines/mm spatial frequency, which was much higher than enzyme method. With the projection exposure system, a micro-prism array with 30 μm wide and 0.8 μm high cell dimension was fabricated using the chemically cleaving-etch method.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2001年第2期146-150,共5页
Chinese Journal of Lasers
基金
中国博士后科学基金
清华大学机械学院基础基金资助课题
关键词
化学裂解
微光学元件
重铬酸盐明胶
chemical cleavage, microoptical elements, continuous relief, dichromated gelatin