摘要
Periodic triangle truncated pyramid arrays are successfully fabricated on the sapphire substrate by a low-cost and high-efficiency laser interference lithography(LIL)system.Through the combination of dry etching and wet etching techniques,the nano-scale patterned sapphire substrate(NPSS)with uniform size is prepared.The period of the patterns is 460 nm as designed to match the wavelength of blue light emitting diode(LED).By improving the stability of the LIL system and optimizing the process parameters,well-defined triangle truncated pyramid arrays can be achieved on the sapphire substrate with diameter of 50.8 mm.The deviation of the bottom width of the triangle truncated pyramid arrays is 6.8%,which is close to the industrial production level of 3%.
Periodic triangle truncated pyramid arrays are successfully fabricated on the sapphire substrate by a low-cost and high-efficiency laser interference lithography（LIL）system.Through the combination of dry etching and wet etching techniques,the nano-scale patterned sapphire substrate（NPSS）with uniform size is prepared.The period of the patterns is 460 nm as designed to match the wavelength of blue light emitting diode（LED）.By improving the stability of the LIL system and optimizing the process parameters,well-defined triangle truncated pyramid arrays can be achieved on the sapphire substrate with diameter of 50.8 mm.The deviation of the bottom width of the triangle truncated pyramid arrays is 6.8%,which is close to the industrial production level of 3%.
基金
the National High Technology Research and Development Program of China(Nos.2011AA03A112 and 2011AA03A106)
the National Natural Science Foundation of China(Nos.11204360 and 61210014)
