摘要
半导体材料的组分不同,决定了其特性的显著差异。为了精确地控制半导材料在生长过程中的气体组分,设计了一种多通道电磁阀控制器。该控制器以单片机为控制核心,具有32个带功率放大的直接数字量输出(DO),可以直接驱动电磁阀从而控制材料生长气路的通断。该控制器可以独立工作,也可以通过RS485接口与上位计算机连接。多个这样的控制器可以进行组合,从而扩展控制规模。与一般的电磁阀控制器相比,抗干扰能力强,设置相对方便。
There are significantly different properties of semiconductor materials which are determined by different components of semiconductor materials. In order to accurately control the proportion of the gas in the process of the semiconductor material growth,a multi channel controller of the electromagnetic valve is designed. The muhi-channel controller based on single chip microcomputer has 32 direct digital output ports with power amplifiers. Every direct digital output port can drive a electromagnetic valve, thus can control the gas in the pipeline on or off. The controller can work autonomously ,and can also be connected to a computer through RS485. Two or more such controllers can be combined to expand the scale of the gas control. Compared with normal controller, this instrument has stronger anti- interference ability, and is easier to use relatively.
出处
《电子测量技术》
2014年第1期66-69,共4页
Electronic Measurement Technology