摘要
为使难挥发性液态气源更好地挥发制取标准气体,提出一种利用负压吸动效应的雾化配气法。设计了结构精密的雾化发生池,用实验的方法确定影响发生池负压值的各种参数,在实际应用中达到良好的效果。利用三种方法对难挥发的液态气源进行配气实验,雾化法与另外两种常用的方法相比,效果更好。
A novel technique, dynamical gas-supply system with negative pressure suction, was developed to signifi- candy improve volatilization of the gas sources of low volatility liquid in standard gas preparation. The impacts of the atom- izing conditions,such as the geometry of the atomizer, size of the gas-liquid mixer, and diluting gas flow rate,on the nega- tive pressure were experimentally evaluated. A prototyped gas supply system based on the negative pressure suction was tested in three different methods, including the techniques of gas diffusion, liquid carry-over in gas stream, and atomization by negative pressure suction,in preparing the standard gas from the low volatility liquid. The results show that the newly- developed atomization technique outperforms the other two conventional methods because of higher efficiency, shorter gas- mixing time, and much wider concentration ranges of the mixed gases.
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2014年第1期1-4,共4页
Chinese Journal of Vacuum Science and Technology
关键词
配气
负压
雾化法
实验
Preparation of gas, Negative pressure, Atomization method, Experiment