摘要
利用金属蒸气真空弧离子源 ,将大束流Nb离子注入到铝中 ,改善了铝表面的力学性能。在离子注入过程中直接形成了金属间化合物Al3Nb。金属间化合物的形成与离子注入的剂量有关。当Nb离子剂量达到 3× 10 17ions/cm2 时 ,Al3Nb相开始形成。随着注入剂量的增加 ,Al3Nb结晶的质量变好 ,当Nb离子剂量达到 8× 10 17ions/cm2 时 ,在铝的表面形成了约 2 0 0nm厚的金属化合物。随着注入剂量的增加 ,铝表面的硬度和弹性模量显著提高。当Nb离子剂量达到 8× 10 17ions/cm2 时 ,铝表面的硬度约为未注入样品的 3倍 ,铝表面的弹性模量约是未注入样品的 3倍。
The surface modification of Al films by high current Nb ion implantation with a metal vapor vacuum arc ion source was studied.The intermetallic compounds,Al 3Nb,directly formed with Nb ion implantation into Al films with a current intensity of 9 mA to a dose of 3×10 17 ions/cm 2 .The hardened aluminides layer,about 200 nm in thickness was obtained and with increasing the Nb ion dose the hardness of the Al surface could increase up to three times larger than that of the unimplanted one.Besides,the modulus of the Al surface were significantly increased by the aluminides.
出处
《真空科学与技术》
CSCD
北大核心
2001年第1期34-37,共4页
Vacuum Science and Technology
基金
国家自然科学基金项目! (19875 0 2 7)
