容积式真空泵真空度测试装置的技术探讨

Technical Discussions on Vacuum Testing Device of Volumetric Vacuum Pump

本文提出了替代压缩式真空计测量容积式真空泵极限真空度的必要条件 。

This text discusses the necessary conditions under which we can test ultimate pressure of volumetric vacuum pump instead of using compresive vacuum gauge. We also develop a new type of testing instrument including its correlative device and testing method. This instrument could completely replace the compressive vacuum gauge.