基于无线传感器网络的芯片生产环境监测系统

Chip Fab Monitoring System Based on Wireless Sensor Networks

针对芯片生产企业对环境温度、湿度、气压、洁净度等指标的严格要求,设计了基于无线传感器网络的芯片生产超净间环境监测系统。系统由已有的硬件部分和提出路由算法的软件部分构成,通过在实际的芯片生产超净间进行测试,验证了该系统不仅能够实时监测芯片生产企业环境参数的变化,而且能够保证传感器节点能量消耗的有效性和均衡性。

For the stringent requirements of chip manufacturers about the environment temperature, humidity, pressure,and cleanliness, chip manufacturing clean room environment monitoring system based on wireless sensor networks is designed. The system consists of existing hardware and software components of the proposed routing algo-rithm. The system is tested in the actual chip manufacturing clean room. The results show that the system can not only monitor the changes of environment parameters in chip manufacturing, but also ensure the effectiveness and balance of energy consumption for sensor nodes.