Ridge Waveguide Electro-Optic Polymer Modulator with a New Kind of Corona Poled Crosslinkable Polyurethane

用新型可交联极化聚合物材料制备的脊波导有机电光调制器(英文)

A polymer electro optic modulator has been fabricated with the functional layer acting as a kind of corona poled crosslinkable polyurethane. The three optical layers, namely waveguide, photolithography and oxygen are fabricated by spin coating. With the Reactive Ion Etching method, the ridge of the waveguide is constructed. With light at 1 31μm being fiber coupled to waveguide, the mode and the modulation properties of these devices are demonstrated in a micron control system.

制备了一种全部以聚合物为波导材料的电光调制器 ,其中芯层为新型可交联极化聚胺脂电光功能材料 .旋涂制备波导薄膜、电晕极化产生非线性、光刻和氧反应离子刻蚀完成脊波导为主要的工艺步骤。 1.3μm光源光纤耦合输入脊波导调制器 。