摘要
动、静涡旋盘之间的泄漏是影响涡旋真空泵抽气性能的重要因素,分析了主要由轴向间隙及径向间隙引起的气体返流泄漏,阐述了相应的密封原理及措施,为涡旋真空泵的优化设计提供新的思路。
The leakage between the fixed and orbiting scrolls is considered to be a vital factor which influences the pumping performance of a scroll vacuum pump , the reflux leakages which mainly caused by axial clearance and radial clearance was ana -lyzed, the relevant sealing principles and methods were expound , so as to provide some new minds for the optimal design of a scroll vacuum pump .
出处
《流体机械》
CSCD
北大核心
2014年第1期40-43,87,共5页
Fluid Machinery
基金
国家自然科学基金项目(51375515)
国家自然科学基金项目(51075417)
关键词
真空泵
泄漏
密封
vacuum pump
leakage
sealing
