光学面形的轮带光学抛光方法研究

Optical belt polishing for optical surface

鉴于光学零件高陡度凹曲面的抛光是光学加工的一个难题,轮带光学确定性抛光方法是解决此类零件抛光的有效方法之一;提出轮带光学抛光技术的原理和方法。研究了轮带光学抛光方法修形的可行性,采用五轴精密数控机床系统对一块直径Ф80mm的K9玻璃平面样镜进行了修形试验,经过3次迭代修形使其面形精度均方根误差(RMS)由初始的0.109λ提高到0.028λ,平均每次收敛率达到1.3。实验结果表明,应用轮带光学抛光技术进行光学镜面修形,面形收敛速度较快,加工精度较高。本实验验证了轮带光学抛光技术的修形能力,为高陡度光学零件的抛光提供了研究基础。

The highgradient concave optics optical belt deterministic polishing method polishing is a problem in optical manufacture. The is one of the efficient ways to solve such optics pol ishing problem. We introduced the theory and method of the optical belt polishing technique, studied the feasibility of figuring the optical surface with the optical belt polishing method. To demonstrate an optical belt polishing process, a φ80 mm K9 glass plane mirror was processed on a 5axis precise computernumericallycontrolled （CNC） machine. Its surface figure accura cy rootmeansquare （RMS） was improved from initial 0.10 9）, （λ=632.8 nm） to final 0. 02 8λthrough three ion beam polishing （IBF） processes, and the mean iterative convergence ratio was 1.3. The result shows that the polishing method has rapid convergence rate as well as ma chining accuracy on surface figuring. This experiment proves that the optical belt polishing can figure this kind of optical Mass, which lawthe foundation for figuring high-gradient optics.