摘要
微/纳尺度接触问题已成为制约微机电系统发展的关键性问题。针对这一问题,以纳米压痕技术为基础,首先分别应用赫兹理论和弹塑性理论分析了不同阶段的接触过程,然后运用有限元分析软件Ansys建立了有限元分析模型,进行了不同载荷下的接触分析,获得了相应的应力和应变分布规律等。然后利用纳米压痕技术进行了实验对比分析。证明了两种研究方式的力学规律一致。从而证明了有限元方法在微/纳尺度接触力学研究方面的可行性。
In recent years, micro/nano contact has become one of the main factors to restrict the development of Micro Electro-Mechanical System. In response to this question, nanoindentation technology as the foundation, Hertz theory and finite element elastic-plastic theory were applied to analysis the different phase of contact. Moreover, the finite element emulated the contact process of under pressure and unloading, obtained the corresponding stress and strain distribution rule, etc. Experiments were carried out by nanoindentation technique. Simulation and test result were basically identical. The results show that the finite element method is feasibility in the contact mechanics behavior of micro/nano scale.
出处
《机械强度》
CAS
CSCD
北大核心
2014年第1期61-66,共6页
Journal of Mechanical Strength
基金
国家自然科学基金资助项目(11062003)
云南省应用基础研究计划资助项目(2009ZC042M)~~
关键词
微机电系统
微纳接触
有限元分析
接触力学
纳米压痕技术
Micro electro-mechanical system （MEMS）
Micro/nano scale contact
Finite element analysis
Contact mechanical
Nanoindentation
