摘要
提出了基于参照探测器的积分球辐射均匀性定标方法并搭建了定标系统。对定标系统的定标精度进行了实验验证,结果表明:相对未考虑辐射漂移影响的情况,该系统对积分球辐射均匀性的绝对标定值提高了0.04%。对美国LabShpere公司USS2000型积分球的辐射均匀性分布曲线进行了标定,标定结果表明:在直径为20 cm的圆形扫描区域内,当探测器受光面与辐射孔径面间距D=0时,积分球辐射均匀性最好,达到99.8%;当D〉80 cm时,均匀性基本达到饱和,接近99%;在D介于二者之间时积分球的辐射均匀性较差,不适合作为标准源。
A method on illumination uniformity calibration of integrating sphere based on referential detector is proposed, and a calibration system is also built. Experiment has been done to validate the accuracy of the established calibration system. The result shows the absolute uniformity value has a 0.04% promotion. As an application, the USS2000 integrating sphere is calibrated with the calibration system, and the uniformity distribution law is depicted. It shows that, in the circular scanning area with the diameter of 20 μm, the illumination uniformity reaches 99.8% when D=0, where D is the distance between the aperture and the scan position, and the uniformity reaches 99% which is the saturation value when D〉80 cm. However, when this distance locates in the region of 0〈D≤80 cm,the illumination uniformity is poor, it can not be considered as a standard source anymore.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2013年第B12期110-114,共5页
Acta Optica Sinica
关键词
测量
均匀性
积分球
标定
measurement
uniformity
integrating sphere
calibration