摘要
玻璃衬底多晶硅薄膜太阳电池因具有成本低廉、转换效率高以及性能稳定等优点引起了人们的广泛关注。详细阐述了玻璃衬底多晶硅薄膜太阳电池的两种典型结构、基本制备流程及其关键工艺对太阳电池性能的影响,还介绍了玻璃衬底制备多晶硅薄膜的直接制备技术、固相晶化技术、液相晶化技术和籽晶层技术以及玻璃衬底多晶硅薄膜太阳电池的研究现状。由于薄膜太阳电池性能的好坏直接取决于薄膜的质量,所以关键工艺中的快速热退火和氢钝化能显著提高电池性能。然而,至今各种制备方法都不够成熟,不能规模化制备多晶硅薄膜,因此改进和发展现有多晶硅薄膜的制备技术是今后玻璃衬底多晶硅薄膜太阳电池研究的核心课题。
Polycrystalline silicon thin-film solar cells on glass substrates have attracted extensive attentions due to their advantages of low-cost, high conversion efficiency and stability. Two typi- cal structures, the basic preparation process and effects of the critical process on the solar cell performance for polycrystalline silicon thin-film solar cells are described in detail. In addition, diverse methods for manufacturing the polycrystalline silicon thin-film on glass substrates are intro- duced, such as the direct preparation technology, solid phase crystallization technology, liquid phase crystallization technology and seed crystal layer technology, and the development status of polycrystalline silicon thin-film solar cells on glass substrates is also introduced. Because the performance of the thin-film solar cell directly depends on the quality of the thin-film, the key tech- nologies of rapid thermal annealing and hydrogen passivation can significantly improve the solar cell performance. However, various preparation methods are not mature enough yet, which can not be used to prepare polycrystalline silicon thin films on a large scale, thus improving and developing the existing preparation technologies of polycrystalline silicon thin films are the core subject of the research for polycrystalline silicon thin-film solar cells on glass substrates in the future.
出处
《微纳电子技术》
CAS
北大核心
2014年第1期17-23,共7页
Micronanoelectronic Technology
基金
江西省自然科学基金资助项目(20122BAB202008)
江西省教育厅科技落地计划资助项目(KJLD12046)
关键词
薄膜太阳电池(TFSC)
多晶硅
玻璃衬底
快速热退火
氢钝化
固相晶化
液相晶化
thin-film solar cell (TFSC)
polycrystalline silicon
glass substrate
rapid thermal annealing
hydrogen passivation
solid phase crystallization
liquid phase crystallization