摘要
密封器件内部气体分析方法 ,可广泛用于微电子、航空航天、金属、陶瓷、食品、医药、化工等涉及材料、气体变化的领域 ,并且可以贯穿于产品的整个寿命周期。介绍了密封器件内部气体分析方法的背景。
The technology of the internal vapor analysis for sealed device is very useful for various industries which subject to the diversified material change or vapor change, and for the whole product life cycle. These industries include Microelectronics, Aerospace, Metals, Ceramics, Food, Medical, Pharmaceutical and Chemistry, etc. The background, IVA analyzer, and the application of the technology have been presented.
出处
《电子产品可靠性与环境试验》
2001年第1期34-39,共6页
Electronic Product Reliability and Environmental Testing
关键词
密封器件
内部气体分析
水汽含量
微电子器件
sealed device
internal vapor analysis
moisture content
quality
reliability
