激光荧光扫描光谱仪

The Scanning Laser Fluorescence Spectrometer

本文介绍了一种智能化激光荧光扫描光谱仪 ,可对大尺寸光致荧光样品进行扫描分析 ,从而获得需要的整体信息。进一步以发光二极管 (L ED)外延片为例 ,介绍仪器进行外延片在线无损检测的应用。该仪器可迅速对 L ED外延片进行在线检测 ,给出相关参数。

A new intelligent laser induced fluorescence spectrometer was developed.Using the instrument,the large size semiconductor sample could be scanned spot by spot and the whole information about the fluorescence spectrum of sample was acquired immediately.All of these measurements were nondestructive.As an example,this instrument was used to detect the fluorescence property of eptiaxial layer of LED chip.The luminescent fluorescence images of 256×256 dots in two inch chip can be acquired in the instrument.