陶瓷湿敏元件的长期稳定性问题及改进措施

The Long-Term Stability of the Ceramic Humidity Sensitive Elements and Its Improvements

陶瓷湿度传感器是湿度传感器的重要发展方向。改善陶瓷湿敏元件的长期稳定性是一项重要的研究课题。本文详细分析了湿敏陶瓷的微观结构和感湿机理 ,评述了引起陶瓷湿敏元件性能漂移的因素和机理 ,以及改善陶瓷湿敏元件长期稳定性的有效措施。

The ceramic humidity sensor is the important trend of the humidity sensor. It is a very important question for study to improve the long-term stability of the ceramic humidity sensitive elements. This paper analyzed the microstructure and humidity sensing mechanism of the humidity sensitive ceramics in detail. The factors giving rise to the drift of the humidity sensitive elements’ properties and the drifting mechanism were reviewed in this paper. In addition, this paper also reviewed the effective methods to improve the long-term stability of the ceramic humidity sensitive elements.