超精密平面磨床关键技术的发展

Development of the Key Technology of Ultraprecision Surface Grinding Maching

随着硬脆材料应用领域的扩大以及砂轮电解在线修整技术的发展，超精密磨的技术在近年来得到了飞速发展，其中超精密平面磨削技术的应用最为广泛。本文介绍了国内外超精密平面磨床的关键技术，包括总体结构、砂轮主轴及驱动系统、导轨及驱动系统、温度及热变形控制等。

With the enlargement of the hard-brittle materials application and the development of electrolytic on-process dressing grinding(ELID),ultra-precision grinding technology has been developed rapidly and the application of ultraprecision surface grinding machining technology is more extensive.In this paper,key technology of some ultraprecision surface grinding machine are introduced,in- cluding general structure,ginding wheel spindle and its drive system,guideway and its drive system,temperature and deformation control etc.