温度对悬臂梁静电驱动RF-MEMS开关性能的影响

Temperature Influence on the Performances of Electrostatic Cantilever RF-MEMS Switch

介绍了温度对悬臂梁式RF-MEMS开关的影响。以南京电子器件研究所研制的悬臂梁式RF-MEMS开关为实验样品,常温下(25°C)先测定样品的驱动电压和射频特性,再将样品置于温度恒定的烘箱中热烘1h,取出后在常温条件下测定其机械形貌及电学性能。烘箱的温度从50°C变化到200°C,步进50°C。针对每个温度做一轮实验,最后将所得数据进行对比。实验结果表明,温度对于开关的射频性能影响极其微弱,但驱动电压对于温度却有较强的依赖性。分析认为,当温度变化时,悬臂梁结构的翘曲是影响驱动电压变化的主要因素。最后提出了几种可以提高结构温度稳定性的方法。

This article focuses on the relationship between the temperature and the perform- ance of the cantilever RF-MEMS switches. Their performances are first measured at room tem- perature （25 °C） and measured again after they are stored in an oven at a certain temperature T （every other 50 °C from 50 °C to 200 °C） for about one hour followed by cooling down to room temperature outside of the oven. The experiment results indicate that the influence of tempera- ture on the RF performance of MEMS switch is negligible, but its influence on the actuation volt- age is susceptible. The distortion of the cantilever is thought to be the main reason for the varia- tion of the actuation voltage. Some methods are proposed at the end of the article to improve the stability of the RF-MEMS switches over temperature.