压阻式压力传感器光干扰消除实验及测试

Experiment and Test of Photoflash Response Elimination for Piezoresistive Pressure Sensor

针对油气爆炸冲击波测量中某型压阻式压力传感器在强光作用下产生负向脉冲的问题,采用传感器表面涂抹碳粉与硅脂混合物的方法隔绝光效应,通过闪光测试表明该方法取得了良好的效果,消除了传感器的光响应。利用激波管测试对比涂抹隔光硅脂前后的传感器动态性能,结果表明:两种状态下传感器的动态灵敏度的变化在校准误差5%范围内,能够在有效消除光影响的前提下满足油气爆炸的测量要求。

This paper is focus on the elimination of photoflash response for a piezoresistive pressure sensor which used in the gasoline vapor explosion pressure measurement.Carbon powder and silicone grease mixture is applied in the surface of the sensor to isolate the photoflash which caused a huge negative impulse.Photoflash effect test results indicate that the light response is eliminated.Dynamic characteristics of the two piezoresistive pressure sensors are tested by using a shock tube.Test results show that the pressure dynamic sensitivity change between two sensors is in the acceptable range of 5％,this indicate that the handled piezoresistive pressure sensor can satisfy the measurement demand of the gasoline vapor explosion.