摘要
IC测试是集成电路生产中的重要工序，探针表面诸如划痕、凹坑等缺陷对性能测试结果影响大.文章研究了IC探针表面质量的机器视觉检测方法，讨论了灰度变换、均值滤波、区域连通、图像分割等缺陷图像处理和形状识别方法，建立了相应的探针表面质量检测系统，并基于机器视觉软件Halcon开发了探针表面质量检测系统软件.实验表明：开发的检测系统可对直径0.3-0.6 mm的IC测试探针表面质量进行快速检测评估，且系统的稳定性好、检测精度高，能有效缩短检测时间和减少检测成本.
IC detection is an important step in the IC manufacture. The defects of IC probe surface, such as the abrasion and dent, deeply effect on the performance detection result. In this paper, the probe surface quality inspection method by the machine vision is studied, the defect image process and shape recognization method are discussed with the gray transform, mean filtering, region link and image segmentation. The surface quality inspection system is developed by means of Halcon software. It is satisfactory that the fast and accurate detection of the IC detection probe with its diameter of 0.3~0.6 mm and the detection cycle and low cost.
出处
《江西理工大学学报》
CAS
2014年第1期60-64,共5页
Journal of Jiangxi University of Science and Technology
基金
江西省教育厅科技项目(GJJ08271)
